Hard Disk Top Layer Analysis by Total Reflection X-Ray Photoelectron Spectroscopy (TRXPS)

抄録

Photoelectron spectra from a typical hard disk were measured at total reflection and non-total reflection conditions by changing the X-ray grazing angle by 0.1° steps. The chemical analysis resulted in C, N, O and F usually making the upper layer of a typical hard disk. We observed enhancement of photoelectron emission of the top layer at total reflection. Pt and Co were only found by non-total reflection XPS because they are constituents of a deeper region than the top and interface region.