Journal of the Ceramic Society of Japan
Online ISSN : 1882-1022
Print ISSN : 0914-5400
ISSN-L : 0914-5400
Volume 101, Issue 1169
Displaying 1-28 of 28 articles from this issue
  • John D. MACKENZIE
    1993Volume 101Issue 1169 Pages 1-10
    Published: January 01, 1993
    Released on J-STAGE: August 06, 2010
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    In the past decade, sol-gel processing has been actively employed for the preparation of new ceramics and for the fabrication of ceramics into many complex geometries. Sol-gel processig is particularly suitable for optical materials. The application of sol-gel technology to the synthesis and fabrication of optical materials is termed “Sol-gel optics.” A review is presented on the basic principles of the sol-gel process and examples are given for some important materials in sol-gel optics. These include many configurations of silica glass, organic-impregnated glasses, organically modified ceramics (ORMOCERS), ferroelectric thin films, amorphous ferroelectrics, nonlinear optical nanocomposites and gradient index lenses. Some future developments in sol-gel optics are discussed.
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  • Masayuki YAMANE, Satoshi NODA
    1993Volume 101Issue 1169 Pages 11-21
    Published: January 01, 1993
    Released on J-STAGE: August 06, 2010
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    Current state and the future prospect of sol-gel process as the fabrication method of r-GRIN elements with large geometry were discussed. The method based on the partial leaching of index modifying cations such as Ti, Ge, Zr from alkoxy-derived silicate gels is advantageous in fabricating r-GRIN rods with large geometry and precise refractive index profile. The largest delta-n attained by this method is estimated to a 0.08-0.1. The method based on the interdiffusion of index-modifying cations in the liquid phase of a wet gel is suitable to fabricate materials with large geometry and large delta-n. The interdiffusion method is particularly suitable to fabricate r-GRIN rods with prescribed spectral variation.
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  • Shigeyuki KIMURA, Kenji KITAMURA
    1993Volume 101Issue 1169 Pages 22-37
    Published: January 01, 1993
    Released on J-STAGE: August 06, 2010
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    Growth techniques of crystals for optical applications are reviewed. LiNbO3 and LiTaO3 for electro-optical devices are grown by the Czochralski method. KDP, LiNbO3, KTP, and BBO for nonlinear optical applications are grown from aqueous solutions, melts and high temperature flux solutions. Garnets, sapphire and crysoberyl are main host crystals for lasers, and PbMoO4 and TeO2 are common crystals for acousto-optical applications. They are usually grown by the Czochralski method. Calcite and rutile provide polarizing elements and are grown, respectively, from either high temperature or hydrothermal solutions and from melts. Quartz crystals for phase plates are grown by the hydrothermal method. BaTiO3, SBN and BSO are photorefractive and photoconductive crystals. BaTiO3 is grown from high temperature solutions and the rest by the Czochralski method. The rare earth iron garnets give optical isolator elements. The bulk crystals are grown by the floating zone method and thin crystals by the liquid phase epitaxy. Crystals for scintillators, CdWO4, Bi4Ge3O12, and Ce: Gd2SiO5, are grown mostly by the Czochralski method. Al2O3 for windows is grown in a thin plate form and MgO for similar purposes by the electric fusion technique.
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  • Michikazu KONDO
    1993Volume 101Issue 1169 Pages 38-42
    Published: January 01, 1993
    Released on J-STAGE: August 06, 2010
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    Electro-optic waveguide switches and modulators, using LiNbO3 crystal, which are the key components in the future optical communication systems, are reviwed. The advantages of the Titanium diffused waveguides include, no degradation of electro-optic effect, low propagation loss, low fiber-coupling loss and ease of fabricaiton. The operating principles and general design considerations of directional couplers switches, cross waveguide switches and balanced-bridge type switches are briefly reviewed. The design and development considerations of a simple polarization independent switch with low drive voltage for OTDR applications, is described. Optical matrix switches for photonic switching systems and optical modulators for high speed optical communication systems are also briefly reviewed.
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  • Hiroyuki NASU, Jun MATSUOKA, Osamu SUGIMOTO, Minoru KIDA, Kanichi KAMI ...
    1993Volume 101Issue 1169 Pages 43-47
    Published: January 01, 1993
    Released on J-STAGE: August 06, 2010
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    The influence of the rare earth elements on the non-resonant type third-order optical nonlinearity was studied by third harmonic generation in germanate glasses. The nonlinearity basically increased by the increase in La2O3 content and decreased by the increase in field strength of the rare earth elements. The relationship between χ(3) and refractive index of the glasses distinctly deviated from that for other germanate glasses. Large hyperpolarizability of the bonding pairs of oxygen and rare earth metal ions seems to contribute to the raise of χ(3).
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  • Takayuki KOMATSU, Hiromasa TAWARAYAMA, Kazumasa MATUSITA
    1993Volume 101Issue 1169 Pages 48-52
    Published: January 01, 1993
    Released on J-STAGE: August 06, 2010
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    The glass-forming region in the system TeO2-BaO-TiO2 and the crystalline phases obtained by heat treatment of glasses were examined to fabricate transparent TeO2-based glasses containing ferroelectric BaTiO3 crystals. The glasses containing up to 30mol% BaO and 20mol% TiO2 were obtained. The glass transition temperatures, 341°-463°C, and crystallization temperatures, 463°-589°C, increased with increasing BaO and TiO2 contents. By controlled crystallization, transparent 70TeO2-15BaO-15TiO2 glasses containing BaTiO3 crystals with a diameter of about 5-10μm were successfully prepared. The small difference in the refractive indices, n, between the TeO2-based glass, n=2.1, as matrix and BaTiO3 crystals, n=2.39, leads to transparency, even though the particle size is much larger than the wavelength of visible light.
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  • Jun MATSUOKA, Ryoichi MIZUTANI, Syoji KANEKO, Hiroyuki NASU, Kanichi K ...
    1993Volume 101Issue 1169 Pages 53-58
    Published: January 01, 1993
    Released on J-STAGE: August 06, 2010
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    Au microcrystal-doped glass films with high optical nonlinearity were prepared by the sol-gel method with dip-coating using NaAuCl4⋅2H2O and tetraethyl orthosilicate (TEOS) as starting materials. The glass film with an Au/Si atomic ratio of 0.01 was successfully prepared. The nonlinear susceptibility χ(3) of the film was 7.7×10-9esu. Microcrystals with a radius of about 7Å and of about 30Å coexisted in the glass film. The nonlinear susceptibility of Au microcrystals itself in the film, χm(3), was 1.0×10-7esu and was two times larger than that observed in Au-doped glasses prepared by the melting method. Subsequent heat treatment of the films at 1000°C changed the absorption spectra and decreased χ(3) by a factor of two. The atomic ratio of Au/Si was able to be increased to 0.04.
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  • Vesselin V. DIMITROV, Sae-Noon KIM, Toshinobu YOKO, Sumio SAKKA
    1993Volume 101Issue 1169 Pages 59-63
    Published: January 01, 1993
    Released on J-STAGE: August 06, 2010
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    The third order nonlinear optical susceptibilities χ(3) of PbO-SiO2 and PbO-B2O3 glasses have been measured by the third harmonic generation (THG) method using silica glass as reference. It is found that the third order nonlinear susceptibilities χ(3) of each series of glasses increase with increasing lead content, corresponding to the increase in the polarizability per unit volume and the decrease in the energy gap of the glasses. The largest χ(3) values obtained are 31.1×10-14esu for a 66PbO⋅34SiO2 glass and 31.2×10-14esu for a 70PbO⋅30B2O3 glass, about 11 times larger than that of pure silica glass.
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  • Tadanori HASHIMOTO, Toshinobu YOKO, Sumio SAKKA
    1993Volume 101Issue 1169 Pages 64-68
    Published: January 01, 1993
    Released on J-STAGE: August 06, 2010
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    Third-order nonlinear optical susceptibility, χ(3), of the sol-gel derived α-Fe2O3 thin film has been evaluated by the third-harmonic generation (THG) method. χ(3) of α-Al2O3 single crystal (1120) with the same corundum structure as α-Fe2O3 has also been determined. The χ(3) of the α-Fe2O3 film was 5.8×10-11esu, which is comparable with those of organic materials with high nonlinearity. The large χ(3) value of the α-Fe2O3 film may be ascribed to the high refractive index of 3.00 and to the three-photon resonance as well. The χ(3) of α-Al2O3 single crystal was 2.9×10-14esu, which is three orders of magnitude lower than that of α-Fe2O3 film and almost the same as that of fused silica. The small χ(3) value of α-Al2O3 single crystal was attributed to the small refractive index and wide optical band gap.
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  • Yoshio KOBAYASHI, Yukihide KAKEGAWA, Youichi KUROKAWA, Kyoichi SUZUKI, ...
    1993Volume 101Issue 1169 Pages 69-72
    Published: January 01, 1993
    Released on J-STAGE: August 06, 2010
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    CdS or CdSe-doped polymer films (acetyl cellulose and polyvinyl alcohol) were prepared by a mutual counter diffusion method. CdS or Ga-doped alumina films were produced by a sol-gel process. Each CdS- or CdSe-doped film exhibited photoluminescence by excitation with an Ar+ laser. In particular, the CdS-doped alumina film did not emit photoluminescence derived from a deep trap level, but only one derived from the absorption edge. Moreover, photoluminescence of the Ge-doped alumina film was first observed.
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  • Toshimi TAKADA, Tetsuji YANO, Atsuo YASUMORI, Masayuki YAMANE
    1993Volume 101Issue 1169 Pages 73-75
    Published: January 01, 1993
    Released on J-STAGE: August 06, 2010
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    Quantum dot materials based on PbS-doped sodium borosilicate glasses were prepared by the sol-gel process using silicon methoxide (TMOS), boron ethoxide, sodium and lead acetates as starting materials. The chemical state of Pb species in the glasses fully densified at 590°C was identified to be PbS by X-ray photoelectron spectroscopy and electron diffraction. The amount of PbS crystallites in the glasses was 4-13wt% of mother glasses. The size of the crystallites was 5-15nm in diameter. The absorption edge of the glasses was near 2500nm, which was slightly shifted to higher energy from 3200nm for the bulk PbS crystal.
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  • Yong-Gun SHUL, Dong-Jo LEE, Jae-Suk LEE, Tatsuo WADA
    1993Volume 101Issue 1169 Pages 76-77
    Published: January 01, 1993
    Released on J-STAGE: August 06, 2010
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    In this work, MNA (2-methyl-4-nitroaniline) and substituted carbazoles were incorporated into silica matrix to form composite thin films on the glass substrate by a sol-gel processing for NLO applications. In the composite thin films, the thermal stability was dependent on the type of functional groups incorporated into the organic compounds. Carbazole-2 (5-nitro-9-hydroxylethyl-carbazole) which has a terminal -OH group showed enhanced thermal stability, whereas carbazole-1 (5-nitro-9-ethyl-carbazole) and MNA, which do not have a reactive functional group, showed rapid degradation upon thermal treatment. This strongly suggests that the thermal stability of incorporated organic compounds can be enhanced by a reactive terminal group in organic compound without severely damaging the NLO property.
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  • Setsuhisa TANABE, Tomohito OHYAGI, Teiichi HANADA, Naohiro SOGA
    1993Volume 101Issue 1169 Pages 78-83
    Published: January 01, 1993
    Released on J-STAGE: August 06, 2010
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    The optical properties of Er3+ ions doped in aluminate glasses were investigated.
    (1) Among three intensity parameters obtained from absorption spectra by Judd-Ofelt theory, Ω2 and Ω4 showed a large value compared with those in other oxide glasses.
    (2) The multiphonon decay rates of the 4S3/2 and 4F9/2 levels were obtained from the radiative transition probabilities and concentration dependence of nonraiative decay rate. The values were nearly equal to those in a germanate glass. The energy gap dependence of the multiphonon decay rate was consistent with the phonon energy of this host, 800cm-1 obtained from the phonon sideband measurement.
    (3) The upconversion fluorescence at 550nm was observed with excitation at 650nm corresponding to the 4F9/24I15/2 absorption, for which the Ω4 value dominate the transition probability.
    (4) The profile of the excitation spectra of upconversion fluorescence by a tunable dye laser showed a deviation from that of the ground state absorption. This result indicates that the excited state absorption from the 4I13/2 level contributes the upconversion in the present glasses.
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  • Xuelu ZOU, Teturo IZUMITANI
    1993Volume 101Issue 1169 Pages 84-88
    Published: January 01, 1993
    Released on J-STAGE: August 06, 2010
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    The energy transfer processes among Nd3+, Yb3+, and Er3+ ions in glasses were investigated by fluorescence spectra and decay times. The results were interpreted on the basis of a kinetic model which describes the interactions between rare earth ions in terms of microparameters characterizing the probabilities of energy migration. The efficiencies of Nd3+→Yb3+ energy transfer were found to increase in the order of phosphate<fluorohosphate<germanate<silicate<aluminate. All the observed emission intensities originating from the 4I13/2 level of Er3+ were mainly determined by the efficiencies of energy transfer from Yb3+ to Er3+ in both Yb3++Er3+ and Nd3++Yb3++Er3+ codoped glasses, and strongly dependent on the concentration ratio of Er3+/Yb3+ for triply doped glasses.
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  • Xuelu ZOU, Teturo IZUMITANI
    1993Volume 101Issue 1169 Pages 89-94
    Published: January 01, 1993
    Released on J-STAGE: August 06, 2010
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    The processes of excitation energy transfer among Nd3+, Yb3+ and Er3+ ions in multicomponent aluminate glasses without any classical glass formers were invetiated experimentally, using a conventional spectroscoy and a kinetic model which describes the interactions between active ions. The efficiency of Nd3+→Yb3+ energy transfer is found to be so high as to nearly reach 100%. In Yb3+ and Er3+ codoped system, a mutual migration of energy occurs. The energy transfer from Yb3+ to Er3+ is considerably less efficient, owing to the influence of efficient back-energy transfer.
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  • Chun Hsun CHU, Min Hsiung HON
    1993Volume 101Issue 1169 Pages 95-98
    Published: January 01, 1993
    Released on J-STAGE: August 06, 2010
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    Silicon carbide deposits were grown on graphite substrates in a horizontal water-cooled quartz tube by thermal decomposition of high purity methyltrichlorosilane (MTS) carried by hydrogen. Morphological and infrared property analyses of films deposited by different process parameters were performed by using scanning electron microscopy (SEM) and IR spectrometry. The morphology of deposits, such as smooth-featureless, nodular, dendritic, faceted, and particles, etc., obtained by the CVD process was dependent on the experimental variables. The dependence of the kinetics of deposition on substrate temperature, reaction pressure and H2/MTS ratio was investigated.
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  • Jie FU, Akiyoshi OSAKA, Tokuro NANBA, Yoshinari MIURA
    1993Volume 101Issue 1169 Pages 99-101
    Published: January 01, 1993
    Released on J-STAGE: August 06, 2010
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    New aluminate glasses were obtained with the conventional melt-quench technique in the system SrO-ZnO-Al2O3. The glass forming region was determined. The glasses were colorless and had good chemical durability in laboratory conditions. When irradiated with UV-light, a broad absorption was induced with a peak at 470nm (2.64eV) and an ESR signal (77K and 300K) was induced with an apparent g-value of 2.006. Both the changes in optical density and the intensity of the ESR signal increased with the ZnO content. From the characteristic of ESR signal, coloring of glass was concluded to a due to the formation of hole trapped on oxygen and electron center resting on zinc ions.
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  • Katsuhisa TANAKA, Kazuyuki HIRAO, Tsuguo ISHIHARA, Naohiro SOGA
    1993Volume 101Issue 1169 Pages 102-104
    Published: January 01, 1993
    Released on J-STAGE: August 06, 2010
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    Transparent glass-ceramics containing ZnAl2O4: Cr3+ have been prepared by heat treatment of the glass with a composition of 20ZnO⋅20Al2O3⋅50SiO2⋅6TiO2⋅4ZrO2⋅0.1Cr2O3 (molar ratio). X-ray diffraction analyses indicated that ZnAl2O4 microcrystals with a crystallite size of 5 to 30nm precipitated in the specimens heat-treated at 850° to 1150°C. Cr3+ ions were incorporated into the ZnAl2O4 phase in the transparent glass-ceramics as demonstrated by the lattice constants determined from the X-ray diffraction. The emission due to the 2E4A2 transition was observed at room temperature for all the heat-treated specimens under the excitation of light at wavelength 507nm from a Xe lamp, representing that Cr3+ ions replaced the Al3+ ions in the ZnAl2O4 microcrystals. The emission spectra were similar to that of single crystalline Cr3+-doped spinel.
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  • Tomoko AKAI, Kohei KADONO, Hiroshi YAMANAKA, Toru SAKAGUCHI, Masaru MI ...
    1993Volume 101Issue 1169 Pages 105-107
    Published: January 01, 1993
    Released on J-STAGE: August 06, 2010
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    Copper-ruby glasses, which exhibit an absorption maximum at about 570nm, were prepared by simultaneous sputtering of copper and silica glass. The glasses turned red by heat treatment for less than 30min at 650°-800°C. The optimum heat treatment temperature was 700°C. Changes of optical absorption with heat treatment time were measured. X-ray diffraction analysis identified precipitated particles to ba Cu particles. The nonlinear optical property of these glasses was evaluated by the degenerate four-wave mixing method. The |χ(3)| value of this glass was 4.0×10-9esu at the wavelength of 532nm
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  • Shoji MORITA, Hideyuki SEKIWA, Hiroaki TOSHIMA, Yasuto MIYAZAWA
    1993Volume 101Issue 1169 Pages 108-112
    Published: January 01, 1993
    Released on J-STAGE: August 06, 2010
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    The effects of the growth parameters of the Czochralski method on bubble formation were investigated. Pure Al2O3 single crystals were bubble free under both atmospheres of N2+1.5%O2 and N2+20%H2. Although Ti doped Al2O3 single crystals grown under an atmosphere of N2+20% H2 were bubble free, the crystals grown under an atmosphere of N2+1.5%O2 contained many bubble. The effective segregation coefficient of Ti ions was estimated to be greatly reduced under non-reducing atmospheres, possibly due to the valence state change of Ti from 3+ to 4+. The convection of the melt was remarkably enhanced under the reducing atmosphere and an influence of the atmosphere to the melt properties was suggested. The condition for the bubble formation is concluded to be similar to that of constitutional supercooling.
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  • Shin-ichi HIRANO, Toshinobu YOGO, Ko-ichi KIKUTA, Yasuhito YONETA
    1993Volume 101Issue 1169 Pages 113-117
    Published: January 01, 1993
    Released on J-STAGE: August 06, 2010
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    Calcite single crystals could be hydrotherally grown in newly discovered NH4NO3 solution even at 150°C. The solubility of calcite in NH4NO3 solution was 4.0g/l at 100°C and 30MPa, and increased with increasing temperature and pressure. The dislocation densities of grown calcite crystals on as-cleaved and etched seeds were 4×105 and 2×104cm-2, respectively. The growth rate on etched seeds was dependent upon both growth temperature and concentration of solution. The maximum growth rate was 45μm/day in 0.2M NH4NO3 solution at 200°C and 15MPa. Calcite crystals grown on etched seeds had the same order of dislocation density as that of high grade natural crystals, and were free from OH- and NO3- ions. This moderate growth condition allows us to employ a Teflon liner for avoiding the contamination from the pressure vessel to grow the optical grade of calcite single crystals.
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  • Mikio HIGUCHI, Kazuto ANDO, Junichi TAKAHASHI, Kohei KODAIRA
    1993Volume 101Issue 1169 Pages 118-120
    Published: January 01, 1993
    Released on J-STAGE: August 06, 2010
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    MgTa2O6 single crystals, which adopt trirutile structure, were successfully grown by a floating zone method, and their optical properties were invetigated. The as-grown crystals were black and opaque, but subsequent annealing in air from 1200° to 800°C rendered the crystals pale-yellow and transparent. The refractive indices for ordinary and extraordinary rays were 2.07 and 2.18 under white light, respectively, and the birefringence was 0.11. The interference figure observed with a polarizing microscope was typical one for an optically uniaxial crystal, which indicates that the crystal was optically uniform. Transmittance in the wavelength range of 500 to 2000nm was about 75%, which approximately corresponded to the theoretical value calculated from the refractive index. The absorption edge of MgTa2O6 was at 290nm.
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  • Hajime HANEDA, Joyce K. YAMAMOTO, Kenji KITAMURA, Shigeyuki KIMURA
    1993Volume 101Issue 1169 Pages 121-123
    Published: January 01, 1993
    Released on J-STAGE: August 06, 2010
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    Diffusion of aluminum, scandium and gallium ions in single crystals has been studied. Stoichiometric crystals have been grown by the Czochralski method using a double crucible and automatic powder supply system. Diffusant concentration profiles were measured by secondary ion mass spectrometry. The diffusivities of all ions depended on the Li/Nb ratio of single crystals. The diffusion coefficients were larger in the samples with lithium deficient composition than in that with stoichiometric composition. This behavior was explained by a cation vacancy model in the lithium niobate lattice.
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  • Masanobu AWANO, Hiroyoshi TAKAGI
    1993Volume 101Issue 1169 Pages 124-128
    Published: January 01, 1993
    Released on J-STAGE: August 06, 2010
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    PLZT ((Pb, La) (Zr, Ti) O3) ceramics was synthesized by the coprecipitation method using nitrates and ammonia. Dehydration was promoted by replacement with butanol and ethanol to prevent the aggregation of primary particles. Precursor gel consisted of well dispersed particles less than 10nm was obtained by replacement with butanol. A powder treated in butanol and calcined at 500°C for 2h was sintered to full density at 1150°C for 6h. Transparency of sintered body was related to its porosity. The sintered body obtained at 1200°C for 20h showed the transmittance of 20%. Mechanochemical effects on the synthesis and pulverization of PLZT ceramics were also examined. Grinding of the precursor gel powder promoted mechanochemical reaction. Grinding of calcined powders caused the decrease in the crystallinity. Sinterability was reduced by grinding, but annealing of calcined and ground powder recovered the original sinterability.
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  • Sunao SUGIHARA, Kiyoshi OKAZAKI
    1993Volume 101Issue 1169 Pages 129-132
    Published: January 01, 1993
    Released on J-STAGE: August 06, 2010
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    The wetting of (Pb, La) (Zr, Ti)O3 ceramics with various electrode metals were studied by measuring the contact angle in a vacuum atmosphere. Two kinds of PLZT were used: x=0.07, y=0.35, and x=0.12, y=0.60 in (Pb1-x, Lax) (Zr1-y, Tiy)O3. The metals studied were Ag, Al, In, Sn, Bi and Cu. The metals forming thermodynamically unstable oxides showed low contact angles: 98° with Ag and less than 90° with Cu. The contact angles were dependent on the composition of PLZT. The other metals indicated the obtuse contact angles as large as 140° since the metals forming the stable oxides can not move by being protected with the oxide. The wettability of a metal on the oxide ceramics can be predicted by the redox reactions of metal and a certain element in the ceramics. In and Sn were bonded with the PLZT but not with BaTiO3.
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  • Toru IZAKI, Hajime HANEDA, Akio WATANABE, Junzo TANAKA, Shin-ichi SHIR ...
    1993Volume 101Issue 1169 Pages 133-138
    Published: January 01, 1993
    Released on J-STAGE: August 06, 2010
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    Self diffusion coefficients of oxygen in PLZT ceramics were evaluated to estimate the vacancy structure by the oxygen-18 isotope exchange reaction and the isotope analysis by the secondary ion mass spectroscopy (SIMS). In the piezoelectric composition of PLZT (10/50/50), the oxygen vacancy concentration was estimated as about one ppm/mol by means of oxygen diffusion measurements and it did not change by doping impurities except for manganese. It was considered that point defects existed at all sites of the perovskite structure of PLZT. On the other hand, the oxygen vacancy concentration increased to 100ppm/mol for manganese doped samples, and the reason was considered that manganese ions were reduced during sintering and that the oxygen vacancies were created to compensate the charge imbalance. In the transparent PLZT (9/65/35), the oxygen vacancy was ten times as much as that in PLZT (10/50/50). The increase in oxygen vacancy was ascribed to volatilization of lead or variation of solubility of lanthanum in B site. All samples showed extraordinary oxygen diffusion at high temperatures near the surface, which was ascribed to the volatilization of PbO.
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  • Mamoru NAKAMURA, Kazuo SAITOH, Masami IKEYAMA, Teruyuki KOZUKA, Ichino ...
    1993Volume 101Issue 1169 Pages 139-142
    Published: January 01, 1993
    Released on J-STAGE: August 06, 2010
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    An experimental study on the utilization of an electro-conductive surface layer on a dielectric Si3N4 component formed by carbon ion (C+) implantation as a crack gage and a strain gage was conducted. Surface cracks were generated by the Vickers indentation. The electrical resistance of the electro-conductive layer increased with the generation of the surface cracks. The resistance was also influenced by stresses which appeared in the layer. Variation of electrical resistance caused by cracking and stresses was so small that the resisitance must have been measured with high accuracy.
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  • Akira KISHIMOTO, Naosuke MATSUZAKI, Tetsuichi KUDO
    1993Volume 101Issue 1169 Pages 143-144
    Published: January 01, 1993
    Released on J-STAGE: August 06, 2010
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    Peroxo polytungstic acids are promising inorganic resist materials which become insoluble in water by UV irradiation. After UV irradiation, part of oxygen molecules, decomposition product of the peroxo groups, was stably caged in the amorphous network. This mechanism is discussed in connection with the densification of thin films during UV irradiation.
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