The effect of nano-Yb
2O
3 additive on crystallization and sintering behavior as well as its properties were investigated using fused quartz powder as raw material and nano-Yb
2O
3 as additive with dosages of 1% to 3% respectively after sintering at 1300 to 1400°C for 1 h. The results showed that cristobalite as the main crystal phase deposited while the sintering temperature was above 1300°C, and with increasing of sintering temperature, the amount of deposited cristobalite increased. Keiviite (Yb
2Si
2O
7) formed by reaction of added nano-Yb
2O
3 with SiO
2 not only restrained the crystallization of cristobalite, but also promoted densification of the materials by inhibiting grain growth of cristobalite. In addition, the addition of nano-Yb
2O
3 effectively decreased the expansion ratio of fused quartz ceramic materials during temperature elevating process by inhibiting crystallization of cristobalite, and the cold bending strength was slightly decreased due to the destruction of silicon-oxygen tetrahedron texture by addition of nano-Yb
2O
3.
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