Corrosion behavior of TiN film coated by an arc ion plating on type 304 stainless steel in demineralized water at 286°C was studied using the circulating type experimental loop. Exposure tests were carried out under three different dissolved O
2 concentratins of less than 10μg/
l, 150μg/
l and 1, 000μg/
l, respectively. Corroded surface was observed by EPMA, XRD and XPS. On the exposed specimen surface, the corrosion film composed of TiO
2 was formed, which increased the weight of specimen after exposure. This weight gain varied largely by dissolved O
2 concentration and it increased by several times with an increase of dissolved O
2 concentration. It was assumed from the relationship between dissolved O
2 concentration and the corrosion rate of TiN that TiN could react with both H
2O and O
2, although the dissolved O
2 became a dominant factor for corrosion increase at concentrations over several 10μgs/
l.
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