The purpose of this research is to contribute to the understanding of the adhesion mechanism which takes effect at the interface of metallic coatings on ceramics substrates with cold spray. There are several reports that the adhesion mechanism of metallic coating on ceramics substrates is due to heteroepitaxial growth. On the other hand, there are reports that the oxide layer exists at the adhesion interface between the ceramic substrate and metal coatings, and which affects the adhesion. In this research, we prepared intentionally oxidized AlN substrates and Al
2O
3 substrates in order to investigate the effect of the oxide layer at the adhesion interface on the adhesion strength. Then, the pre-heating temperature of the ceramic substrates were adjusted and cold sprayed aluminum coatings. As a result of evaluating the adhesion and the interface, heteroepitaxial growth was not inhibited in the oxide layer having a thickness of about 1μm. However, as the oxidation progressed, the bonds between the ceramic particles weakened, which hindered the strong adhesion.
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