Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
Volume 58, Issue 9
Displaying 1-6 of 6 articles from this issue
Special Issue 1: Vacuum Technology Supporting Our Everyday Life
Review
  • Tsuneo FUKUDA
    2015Volume 58Issue 9 Pages 325-329
    Published: 2015
    Released on J-STAGE: September 29, 2015
    JOURNAL FREE ACCESS
      Fundamental aspects for low- and medium-vacuum regions are described. Some long-standing problems, such as slip flow, pumpdown curve for viscous flow region, and vacuum drying are presented. The importance of slip velocity at a pipe wall for the Knudsen number between 0.01 and 0.1 is enlightened. A numerical result for a pumpdown curve with a pressure dependent conductance in the viscous flow regime was presented with an emphasis on a t−1 pressure decrease. In addition, vacuum drying process is modeled with a water containing capillary and pressure dependent mass flow is discussed.
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Technical Note
  • Tsuyoshi KAGE
    2015Volume 58Issue 9 Pages 330-333
    Published: 2015
    Released on J-STAGE: September 29, 2015
    JOURNAL FREE ACCESS
      The unique properties of diamond like carbon (DLC) film, including its chemical inertness and impermeability, make it possible for new applications in food and beverage.
      In this paper, I summarize and review the recent progress of gas barrier enhancement of polyethylene terephthalate (PET) bottles for beverage from the view point of the application of DLC coating.
      A unique technique of plasma CVD method has been developed to deposit DLC layer on the inside surface of PET bottles. The DLC-coated PET bottle exhibits extremely high gas barrier properties against oxygen, carbon dioxide and flavors compared to conventional bottles.
      For the practical use of PET bottles as a commodity, high speed and low cost coating are essential; accordingly several high speed coating machines with a capacity of up to 18000 bottles per hour have been developed, and successfully operated so far for a large production of soft drink. Low speed machines have also been introduced for wine, Japanese sake, edible oil, seasonings and others.
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  • Kazuhisa HATAKENAKA
    2015Volume 58Issue 9 Pages 334-338
    Published: 2015
    Released on J-STAGE: September 29, 2015
    JOURNAL FREE ACCESS
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  • Akiyoshi OHIRA
    2015Volume 58Issue 9 Pages 339-345
    Published: 2015
    Released on J-STAGE: September 29, 2015
    JOURNAL FREE ACCESS
      Energy-saving in the household refrigerators is attracting attention from consumers because their energy consumption is the largest in the home. Increasing capacity and improving energy-saving performance, which are both major consumer needs, are key technological challenges in the development of more environmentally friendly refrigerators. Energy-saving performance was improved by using vacuum insulation panels to reduce the amount of heat escaping through the insulation walls and by using high efficiency compressors to reduce input energy. Furthermore, Hitachi has achieved both high capacity and energy-savings by using unique energy-saving technologies.
      Additionally, with the rise of health consciousness, a “Vacuum Compartment” has been used to successfully preserve food items for longer.
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Product Note
  • Masako NISHIMURA, Masahiko AJIMA
    2015Volume 58Issue 9 Pages 346-350
    Published: 2015
    Released on J-STAGE: September 29, 2015
    JOURNAL FREE ACCESS
      The tabletop scanning electron microscope (the tabletop SEM) was developed to provide “a leading-edge electron microscope even easier to use and more accessible to people”. Combining the resolution of an electron microscope with the ease-of-use feature of an optical microscope, the tabletop SEM revolutionized the idea of an electron microscope and it is now used in a wide range of fields world-wide, including private sectors to government agencies, universities, hospitals and science museums. The tabletop SEM also plays a role in Hitachi's corporate social responsibility (CSR) activities supporting education for elementary school to college students around the world. By providing children with an opportunity to experience the micro-world at first hand, and potentially arousing their interest in science, Hitachi aims to develop human resources that are ready to work in the fields of science, technology, engineering, and mathematics (STEM).
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Regular Paper
Letter
  • Yosuke TAKIGUCHI, Hiroshi TOYOTA
    2015Volume 58Issue 9 Pages 351-355
    Published: 2015
    Released on J-STAGE: September 29, 2015
    JOURNAL FREE ACCESS
      We fabricated Zinc oxide (ZnO) films on a glass substrate by using RF magnetron sputtering. The effect of ion irradiation controlled by target RF power PT and Ar pressure PAr on the ZnO film properties was investigated. Argon ion line intensity IArII near the target increased with PT. The IArII was almost constant with the increase in PAr. The effect of ion irradiation was enhanced by increasing PT, while the effect decreased with the increase in PAr. Carrier density n and hall mobility μ of the fabricated ZnO films were strongly dependent on the film structure affected by ion irradiation. For PT=70 W and PAr=0.7 Pa, the lowest film resistivity ρ of 2.4×10−3 Ωcm was measured. The average visible transmittance TAV was estimated assuming the thickness of fabricated ZnO films was consistently 150 nm. TAV increased with the effect of ion irradiation. We found that the effect of ion irradiation was useful for controlling the properties of ZnO films.
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