A cathodoluminescence (CL) spectroscopy system equipped into a High Voltage Electron Microscope of Kyushu University (maximum acceleration voltage of 1250 kV) is introduced. This equipment allows us to acquire CL spectra in situ under high-energy electron irradiation, or under the production of Frenkel defects in specimens. Monitoring the accumulation process and charge states of point defects, which would not be available from conventional image analysis, is expected during electron irradiation. In this paper, recent results by the authors, that is, the accumulation of F centers and electron energy dependence of CL spectra in α-Al2O3 and cubic stabilized zirconia doped with 9.5, 18 mol% yttria (ZrO2: Y, or YSZ) during electron irradiation are described.
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