We have developed a bellows-type vacuum suction pad with strain gauges attached to its sides. The strain gauges are placed and pasted in all four directions of the suction pad, so the pad operates as a six-axis load cell in its own right. The resistance value changes as the suction pad deforms, and this is read to detect compression, tension, and/or tilt of the suction pad. The strain gages were formed using a polyimide film as a substrate, on which a NiCr thin film was deposited by a sputtering method. The strain gauges were patterned using a shadow mask with gaps in the shape of the strain gauges during sputtering. This paper describes the principle of operation of the vacuum suction pad with strain gages and details of the fabrication method.

有機デバイス作製法の中でも溶液を用いた湿式法は，低コスト大面積製造が期待でき，注目を集めている．従来の湿式法がもつ三つの弱点，①積層が困難，②塗り分けが困難，③溶液濃度の制約を解決すべく，筆者らが開発した，希薄溶液からのスプレイ法を紹介する．この方法では，同じ溶媒に可溶なものでも複数の高分子半導体を積層し，積層型有機エレクトロルミネッセンス（EL）素子とすることができる．この積層型素子ではヘテロ界面でのキャリア閉じ込めによって素子特性が向上し，ELスペクトルが印加電圧によって変化してしまうことを抑制できた．また，