抄録
It is known to measure precision profile with three or more displacement sensors. Serial three point method is very simple particularly but it has some disadvantages that it is difficult to modify the intervals of displacement sensors and the accidental errors accumulate.This paper presents a new measuring method using smoothed serial three point method.This method is improved on serial three point method using smoothing and weighted least square method. In the present paper the influence of smoothing is theoretically clarified in relation to the error with the real profile and the feasibility of this method is verified theoretically and experimentally.
