Decomposition efficiencies
η of SiH
4 and the related gas M in SiH
4-M-Ar glow-discharge plasma sustained by Ar carrier gas for fabrication of hydrogenated amorphous-silicon alloy (a-SiX:H) have been measured by mass spectrometry, where gas M is Si
2H
6, SiF
4, GeH
4, C
3H
8, C
2H
6, C
2H
4, C
2H
2, CH
4, CF
4, NH
3, or CO
2. Relative rate constant of dissociation reaction of gas M to SiH
4, K
d,M/K
d,SiH4 determined from
ηM and
ηSiH4 enables to correlate with the lowest thermodynamic dissociation energy
ΔH of the gas M by K
d,M ∝ exp(-
ΔH/1.10). Relative in corporation probability into a-SiX:H alloy of relevant radical R for the gas M to SiH
n (n = 0-3) radicals for SiH
4,
γR/
γSiHn has been estimated using the film-compositions [X] and [Si] in the a-SiX:H alloy and decomposition efficiencies
ηM and
ηSiHn in the plasma, where a-SiX:H alloy is a-SiGe:H, a-SiN:H, a-SiC:H, or a-SiO:H. The variation in
γR/
γSiHn is at most three times, while that in K
d,M/K
d,SiH4is of two orders of magnitude.
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