The hydrophobic surface modification of the hydrogenated amorphous silicon carbide (a-SiC : H) films were developed using of CF
4 plasma treatment.
The contact angle of water drop on a-SiC : H films becomes up to 95° after the CF
4 plasma treatment. A hydrophobic inorganic layers containing C-C (or CH
2) and C-F
n (
n=1−3) bonds are formed on the surface of the a-SiC : H films.
The contact angle of water drop on CF
4 plasma treated a-SiC : H films are about 20°larger than those of the as deposited films for the repeated cycles of corona charging.
A new a-Si : H photoreceptor with the CF
4 plasma treated a-SiC : H films for the surface
passivation layer were fabricated. There are little change in the photosensitivity though the
surface potential decreases by 20% after the CF
4 plasma treatment.
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