The characteristics of airflow turbulence in a unidirectional cleanroom are described in this paper. Firstly, the airflow turbulence distribution is measured in a cleanbooth with a hot-wire anemometer. Through the analysis of turbulence intensity, the shape of pleated HEPA filter is found out to be an important factor of eddy generation in airflow. Secondly, turbulence distribution behind HEPA filter is measured in detail. It concludes that the shear stress, caused by the airflow difference between pleated concave and convex part of HEPA filter, makes eddy generation in airflow behind HEPA filter.
