In the most advanced manufacturing facilities, required environmental specifications are become strictly and more complex. We proposed brand-new high rigid pedestal flooring for precision device such as photolithography equipment. The foundations are adhesively-bonded with cuneal steel chips, so that a high positioning accuracy can be achieved easily. A high stiffness and a high strength of the binding site are shown. All materials employed in the foundations are free from chemical contamination, which is one of the big problems for producing defectives in the clean rooms.
