着陸レーザーレーダ用2次元MEMS光スキャナ

抄録

We present the design, fabrication, and demonstration of a two-dimensional MEMS (microelectromechanical systems) optical scanner for a compact laser radar for a spacecraft landing on a planet. Electrostatic force caused by the voltages applied to the comb-like micro electrodes is adopted as an operation principle that is inherently robust to the harsh environment in space. Optical scan angles of 10^º × 15^º is obtained with drive voltages of 150V.