抄録
The large potential energy stored in highly charged ions is liberated when these ions recombine during impact on a solid surface. For certain target species this can cause enhanced sputtering and nanodefect formation. We summarize the properties of slow highly charged ions which are relevant for surface interaction and propose their use as a new and very selective tool for nanostructuring of surfaces. [DOI: 10.1380/ejssnt.2003.171]
