Desorption of Hydrogen from the Steps on the Miscut Si(111) Surface Studied by SFG Spectroscopy

抄録

We used sum frequency generation (SFG) spectroscopy to study the desorption of hydrogen on the stepped Si(111) surface with a miscut angle of 9.5° toward the [112] direction in ultra-high vacuum. The terrace peak was observed at 2085 cm⁻¹ and the vertical step mode of dihydride was observed at 2098 cm⁻¹ for the ssp-polarization (s-polarized SFG, s-polarized visible, and p-polarized infrared light) combination. The intensity reduction of these two peaks was monitored directly as a function of time at sample temperatures of 593 K. The rate of reduction was faster for the step dihydride peak than for the terrace monohydride peak.