Effect of Cadmium Precursor Solutions on Fabrication of CdS Thin Films by Successive Ionic Layer Adsorption and Reaction (SILAR) Technique

抄録

CdS thin films were fabricated on ITO-covered glass by successive ionic layer adsorption and reaction (SILAR) technique. The thickness of the CdS thin films increased with increasing the number of SILAR cycles. However, it was about 1/3 of the thickness expected from the ideal deposition process. The surface roughness increased as growth of CdS thin films. To increase the film thickness and to reduce the film roughness, we tried to change counter ions of cadmium ion source solution and to add chelating agent to the solution. In case of using CdCl₂ and triethanolamine, the film thickness was increased and the surface roughness was reduced.