IEICE Electronics Express
Online ISSN : 1349-2543
ISSN-L : 1349-2543
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Miniaturized ultrahigh frequency fundamental quartz resonators
Hirokazu Iwata
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2004 Volume 1 Issue 12 Pages 346-351

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Abstract

I fabricated an inverted-mesa quartz resonator having a 2.2-µm-thick vibrating area by wet etching. The resonator excited a 622-MHz-fundamental thickness vibration. By selecting a 30-nm-thick gold electrode, the temperature-frequency characteristics exhibited a cubic curve with a frequency deviation of 26ppm over a range of temperature from -40°C to +85°C. Furthermore, the resonator was miniaturized to reduce loss caused by the film resistance, and to decrease the parallel capacitance. The series resistance at the noninductive resonance frequency was 33ohm and the parallel capacitance was 0.96pF. Therefore, the fundamental thickness vibration had a wide inductive region.

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© 2004 by The Institute of Electronics, Information and Communication Engineers
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