IEICE Electronics Express
Online ISSN : 1349-2543
ISSN-L : 1349-2543
LETTER
Development of a vertical optical coupler using a slanted etching of InP/InGaAsP waveguide
Sunghan ChoiAkio HigoMasaru ZaitsuMyung-Joon KwackMasakazu SugiyamaHiroshi ToshiyoshiYoshiaki Nakano
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2013 Volume 10 Issue 6 Pages 20130116

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Abstract

We demonstrate a simple and efficient optical coupler for vertical coupling between optical fibers and InP-based waveguides using a slant-etched mirror. The angle of the etched mirror can be controlled by using an aluminum jig with a beveled surface inserted under the substrate during RIE (reactive ion etching) of InP/InGaAsP. The off-chip coupler is fabricated simultaneously with a high-mesa waveguide with only one etching process. Coupling loss of 7.3dB between the tapered single-mode fibers is obtained within the wavelength of 1530-1570nm.

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© 2013 by The Institute of Electronics, Information and Communication Engineers
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