Development of a vertical optical coupler using a slanted etching of InP/InGaAsP waveguide

Sunghan Choi; Akio Higo; Masaru Zaitsu; Myung-Joon Kwack; Masakazu Sugiyama; Hiroshi Toshiyoshi; Yoshiaki Nakano

doi:10.1587/elex.10.20130116

LETTER

Development of a vertical optical coupler using a slanted etching of InP/InGaAsP waveguide

Sunghan Choi, Akio Higo, Masaru Zaitsu, Myung-Joon Kwack, Masakazu Sugiyama, Hiroshi Toshiyoshi, Yoshiaki Nakano

著者情報

キーワード: slanted etching, optical waveguide, optical coupler

ジャーナルフリー

2013 年 10 巻 6 号 p. 20130116

DOI https://doi.org/10.1587/elex.10.20130116

詳細

抄録

We demonstrate a simple and efficient optical coupler for vertical coupling between optical fibers and InP-based waveguides using a slant-etched mirror. The angle of the etched mirror can be controlled by using an aluminum jig with a beveled surface inserted under the substrate during RIE (reactive ion etching) of InP/InGaAsP. The off-chip coupler is fabricated simultaneously with a high-mesa waveguide with only one etching process. Coupling loss of 7.3dB between the tapered single-mode fibers is obtained within the wavelength of 1530-1570nm.

責任著者(Corresponding author)

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