IEICE Electronics Express
Online ISSN : 1349-2543
ISSN-L : 1349-2543
LETTER
Microelectromechanical XNOR and XOR logic devices
Makoto MitaManabu AtakaHiroshi Toshiyoshi
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2013 Volume 10 Issue 8 Pages 20130187

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Abstract

We have developed a new microelectromechanical logic device using the MEMS (Micro Electro Mechanical Systems) technology. This device consists simply of a single cantilever and two driving electrodes with two contact pads for electrostatic operation. Both exclusive NOR (XNOR) and exclusive OR (XOR) logic devices have been realized using this simple construction.

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© 2013 by The Institute of Electronics, Information and Communication Engineers
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