IEICE Electronics Express
Online ISSN : 1349-2543
ISSN-L : 1349-2543
Optical and capacitive characterization of MEMS magnetic resonator
Muhammad U. MianJohn O. DennisMohd H. B. M. KhirMawahib G. A. AhmedAlmur A. S. RabihTong Boon Tang
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2016 Volume 13 Issue 18 Pages 20160773


In this paper a Lorentz force driven Micro ELectro Mechanical Sytems (MEMS) resonator fabricated on PolyMUMP process with optical and capacitive sensing is presented. The resonator is designed by combining the two poly layers which result in an increase in the thickness of the resonator. Lorentz force generates lateral displacements at low driving voltages which are proportional to the magnetic field and the input current. A displacement of more than 9.8 µm was achieved with a magnetic field of 0.12 T and a driving current of 27 mA. Magnetic sensitivity of 1.41 V/T in air was experimentally measured using permanent magnets and capacitive sensing circuitry. Optical results demonstrate the sensitivity values between 0.090 µm/mT and 0.074 µm/mT.

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© 2016 by The Institute of Electronics, Information and Communication Engineers
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