IEICE Electronics Express
Online ISSN : 1349-2543
ISSN-L : 1349-2543
LETTER
Equivalent circuit model of through-silicon-via in slow wave mode
Fengjuan WangGang WangNingmei Yu
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JOURNAL FREE ACCESS

2017 Volume 14 Issue 22 Pages 20171025

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Abstract

The equivalent circuit of signal-ground through-silicon-via (GS-TSV) in slow wave region is developed based on the microwave theory, and is verified by employing ANSYS HFSS. The ADS results of the equivalent circuit of GS-TSV consistent well with the HFSS simulation data. The results of slow-wave equivalent circuit are more accurate than those of widely used quasi-transverse electric and magnetic (TEM) equivalent circuit in slow wave region.

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© 2017 by The Institute of Electronics, Information and Communication Engineers
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