Experimental analysis of out-of-plane Lorentz force actuated magnetic field sensor

抄録

In this article, we present a simple MEMS magnetic sensor based on Lorentz Force principle. In this work, the sensor is designed, fabricated and characterized capacitively using a standard capacitance to voltage MS3110 circuit. The sensor is fabricated based on double thickness PolyMUMP surface micromachining process. In this process, the two Poly layers are combined to increase the thickness of the sensor beams and central shuttle. In response to an input excitation current an out of plane motion due to Lorentz force occurs which is detected by the change in capacitance between the moving and static plate. The experimentally detected resonant frequency of the sensor is 5.1 kHz. The experimental sensitivity achieved by the sensor at atmospheric condition is 5.59 V/T for the input current of 30 mA with a damping ratio of 0.010.