A low power accelerometer system with hybrid signal output

Abstract

A low power micromechanical capacitive accelerometer system is presented with hybrid signal output in this paper. Correlated-double-sample (CDS) technique is utilized in the front end circuit to ensure low noise output signal. The accelerometer system provides direct digital output, and analog output is also available. The chip is implemented in a standard 0.35 µm CMOS process with a power dissipation of 19 mW from a single 5 V supply. The digital output signal achieved a noise floor of 2 µg/√Hz, and the precision of analog output signal is 3.75 µg/√Hz.