2021 年 18 巻 19 号 p. 20210299
In 3D NAND Flash, new read operation scheme is proposed to optimize read disturb in unselected strings. During read operation, the two types of read disturb occur, which are soft programming and HCI-induced read disturb. These are caused by repetitive Fowler-Nordheim (F-N) stress and boosting channel potential difference, respectively. In this letter, we show optimization of two read disturb phenomena through technology computer-aided design (TCAD) simulation with partial-boosting channel potential. Furthermore, the various conditions that affect channel potential in read operation are investigated. These results will be basis of the practical 3D NAND read operation analysis.
