High spectral resolution terahertz detectors with a filter on-chip antenna

抄録

A 2.58THz detector based on plasma-wave theory proposed by Dyakonov and Shur was designed and fabricated in 55nm standard CMOS process. Each detector consists of a filter patch antenna and a metal-oxide-semiconductor field-effect-transistor (MOSFET). We design a filter antenna to receive the terahertz signal, and the output of detector is extracted by a phase-locked amplifier. The antenna generates filtering function by adding two pairs of branches to the feeding lines. The frequency selection function of high spectral resolution detector proposed in this paper is mainly realized by filtering antenna. According to the test results and HFSS simulation results, the proposed filter antenna is feasible. The detector can achieve a room-temperature maximum responsivity (R_V) of 67.2V/W. Our results show that CMOS terahertz detectors have potential applications in the imaging field.