IEICE Electronics Express
Online ISSN : 1349-2543
LETTER
Sensor array characteristics of MOS Hall-plates and the comparison with split-drain MAGFETs
Kazuhiro NakanoToru TakahashiShoji Kawahito
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2006 Volume 3 Issue 13 Pages 328-332

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Abstract

This paper describes magnetic sensor array characteristics of MOS Hall-plates and the comparison with split-drain MAGFETs. A problem of the magnetic sensor array is the offset deviation which is caused by process imperfection. To investigate the magnetic sensor array characteristics suitable for an array structure, a test chip integrating magnetic sensor arrays with different structures of MOS Hall-plates and split-drain MAGFETs are fabricated using 0.25µm standard CMOS process. The ratio of the sensor signal to offset deviation of the MOS Hall-plates is three times higher than that of the split-drain MAGFET. From the measurement results of MOS Hall-plates with different shapes, it is found that a Hall-plate with longer channel and probes located closer to the center of the channel has small offset deviation.

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© 2006 by The Institute of Electronics, Information and Communication Engineers
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