Characterization of surface forces for electro-mechanical memory cells

Abstract

By comparing experimental and simulation data, surface forces of electro-mechanical memory cells were characterized. In the case of aluminum beams, surface forces were negligible due to rough surface topology. However, in the case of titanium-nitride beams, surface force density was estimated to be 624kPa. The extracted value of surface force can be fed back into the finite-element-analysis (FEA) simulation for better modeling accuracy.