論文ID: 20.20230164
An integrated sensor for temperature (Temp) and humidity (RH) measurement is designed. The temperature and humidity (T/H) sensing probe are combined with one first-order discrete-time Σ-∆ analog-to-digital converter (ADC). Also, a new ample architecture of ADC is proposed, ADC selects a reasonable reference voltage according to varied range of T/H signals. Therefore, the dynamic range utilization rate of ADC is improved. The proposed sensor is designed and fabricated in 0.153μm CMOS technology. The experimental results show that the T/H sensor achieves a −0.9∼0.6% RH measurement accuracy in the humidity range of 10∼90% RH, and ±0.4℃ temperature measurement accuracy in the temperature range of −40∼120℃.