電気学会論文誌C(電子・情報・システム部門誌)
Online ISSN : 1348-8155
Print ISSN : 0385-4221
ISSN-L : 0385-4221
<電子物性・デバイス>
水熱合成法により成膜したPZT多結晶膜を用いた小型超音波プローブの特性評価
長谷川 智仁石河 睦生黒澤 実竹内 真一
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2011 年 131 巻 6 号 p. 1174-1180

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Two types of transducers for small ultrasound probes were fabricated. Titanium or epoxy resin were used for the backing material of the transducers. The piezoelectric material was lead zirconate titanate (PZT) that was deposited by the hydrothermal method. These transducers were built into a small ultrasound probe and the characteristics were evaluated. As a result, we succeeded in the fabrication of a wideband ultrasound probe with a distance resolution of 16μm, a frequency bandwidth of 69MHz in the range of 39 to 98MHz, and a fractional bandwidth of 86% at the epoxy resin backing probe.
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© 電気学会 2011
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