電気学会論文誌C(電子・情報・システム部門誌)
Online ISSN : 1348-8155
Print ISSN : 0385-4221
ISSN-L : 0385-4221
<情報通信工学>
帯電した人体からのESDにおける絶縁破壊電界の帯電電圧依存性
高 義礼加川 義久藤原 修
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2013 年 133 巻 12 号 p. 2149-2154

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We previously measured discharge currents due to collision of the hand-held metal piece of a charged human through a 50 Ω SMA connector with a 6 GHz or 12 GHz digital oscilloscope, and then proposed an equivalent circuit model to calculate the discharge current. This model enables one to derive a discharge voltage across the spark gap from the measured discharge current, which revealed that at charge voltages bellow 600 V the estimated breakdown fields from the discharge voltages are almost kept constant (2-3×107 [V/m]) regardless of the different approach speeds of the metal piece. In this study, with a 12 GHz wide-band digital oscilloscope, we measured the discharge currents through a commercially available IEC calibration current target in order to estimate breakdown fields at different charge voltages from 200 V to 8,000 V. As a result, we confirmed that at charge voltages below 400 V, the breakdown fields show an almost constant value of (2-3)×107 V/m. It was also found that the breakdown fields at charge voltages from 600 V to 1,000 V decrease with charge voltages, and approximately agree with the Pachen's law, while at 2,000 V to 8,000 V they are smaller compared to the results calculated from the Pachen's law.
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