電気学会論文誌C(電子・情報・システム部門誌)
Online ISSN : 1348-8155
Print ISSN : 0385-4221
ISSN-L : 0385-4221
<電子物性・デバイス>
スピンコート法により作製したP(VDF-TrFE)薄膜を用いたPEA空間電荷測定
真田 聡太弓達 新治尾崎 良太郎門脇 一則
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2019 年 139 巻 10 号 p. 1134-1139

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Pulsed electroacoustic (PEA) space charge measurements using a spin-coated Poly(vinylidene fluoride-trifluoroethylene) P(VDF-TrFE) thin film are demonstrated. The thickness of the P(VDF-TrFE) thin film is determined by a reflection interference method. The piezoelectric properties of the P(VDF-TrFE) film such as polarization hysteresis curve, residual polarization and coercive electric field are measured using a Sawyer-Tower circuit. The acoustic signals detected by 3-, 9-, and 30-µm piezoelectric films show strong thickness dependence, and the anti-resonance frequencies of the three films are evaluated by fast Fourier transform analysis. The space charge profiles on a 125-µm polyimide film surface are measured by PEA method. The space charge profile obtained by the 3-µm P(VDF-TrFE) film shows better spatial resolution compared with the results obtained other films.

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