<電子物性・デバイス>
フレキシブルBaTiO3薄膜の作製
2019 年 139 巻 3 号 p. 211-212
詳細
2019 年 139 巻 3 号 p. 211-212
Most flexible polymer substrates are not heat-resistive. Therefore, flexible devices mainly consisted of amorphous oxides or organic materials showing excellent electric property and/or optical transparency because they are easy to prepare with the excellent properties even at low process temperature. In this study, we report a trial of transferring ferroelectric BaTiO3 “epitaxial” thin film on flexible plastic sheet using acid etching process of MgO(100) single-crystal substrate.
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