We report on investigation of photon-stimulated desorption processes of polymethylmethacrylate (PMMA) induced by vacuum ultraviolet (VUV) irradiations. Atoms or molecules on PMMA surfaces were to be desorbed and dissociated as a result of absorption of the wavelength-selected VUV photons. Desorbed and dissociated atoms or molecules were then detected by a mass spectrometer which were obtained as a function of the irradiation wavelength. Desorption species with mass number of 28, 29, and 30 were detected at center wavelength of around 160-170 nm, which were identified as CO, CHO, and C2H6, respectively. These photon-stimulated desorption processes of PMMA depend on bond energy or molecular structure.
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