フレキシブルな[001]配向Pb(Zr_0.52, Ti_0.48)O₃エピタキシャル薄膜の強誘電特性

抄録

We have aimed to apply epitaxial Pb(Zr_0.52, Ti_0.48)O₃ (PZT) thin films of ferroelectric and piezoelectric properties to flexible and wearable ultrasonic devices. To realize the flexible epitaxial PZT thin films, PZT thin films were transferred onto flexible printed circuit (FPC) composed of flexible polyimide sheet and Cu electrodes. To adhere PZT thin films to Cu electrodes of FPC, we used copper foil double-coated conductive adhesive tape. Buffer layer of Pt (60 nm) between PZT thin film and adhesive tape was quite effective to avoid serious exfoliation and cracks on the transferred PZT thin film. Transferred epitaxial PZT thin films onto Cu electrodes of FPC showed good electrical contact to the Cu electrodes and P-E hysteresis of ferroelectric characteristics was successfully measured.