新形状GTカット水晶振動子の支持部寸法と板厚による諸特性への影響

抄録

This paper describes the influence on various characteristics such as resonant frequency, frequency temperature behavior and electrical equivalent circuit parameters due to a dimension of supporting portions and thickness for a new shape GT cut quartz crystal resonator. It was reported by one of the authors that the new shape GT cut resonator which is manufactured by an etching process, has more excellent frequency temperature behavior than the conventional GT plate manufactured by a mechanical process. Since it consists of a vibrational portion and two supporting portions and is a coupling resonator coupled between width extensional mode and length extensional mode, the dimension of the supporting portions and thickness greatly inflluence the frequency temperature behavior and electrical characteristics. The object of this paper is to clarify resonant frequency, frequency temperature behavior and electrical equivalent circuit parameters versus width of the elastic parts for the supporting portions and/or thickness. As a result, the first order temperature coefficient of the width extensional mode becomes small markedly as width of the elastic parts increases. The present resonator is also found to have an increasing series resistance and a decreasing quality factor according to increase of thickness.