抄録
We propose a miniature actuator which can move in x, y and _??_ directions without guide rails. The proposed actuator consists of piezoelectric and electromagnetic elements. The structure of the actuator and the principle of the motion are described. Since the electromagnetic field does not have an airgap, the proposed actuator uses the electromagnetic flux effectively. The electromagnetic force is controlled for holding the actuator on the slope. The measured electromagnetic force is large enough for the actuator to hold on a slope. Small displacements in the linear and the rotational directions are realised by the deformations of the piezoelectric elements. The displacements in linear and rotational directions were proportional to the applied voltage of the piezoelectric actuators. The μm range linear step displacement and the μrad range rotational step displacement are realised.
