抄録
Micromanipulation systems using haptic interface are developed to fabricate a micro robot, or process and inspect micro components. These are scaled bilateral tele-operation systems among different structures. These systems are composed of the original 6DOF parallel link manipulator to carry out micromanipulation and haptic interface with force feedback. It aims to make the micromanipulation more effective by realizing the expantion of scale and force of the micro environment to the operators.
In this paper, we propose new micromanipulation systems and evaluate performances. And we analyze proposed systems by doing fundamental experiments from the viewpoints of preciseness and manipulability.
