2010 Volume 130 Issue 1 Pages 6-9
The preparation of water-repellent films by plasma-coating has been reviewed and then unique applications of the hydrophobic films are also introduced. Ultra-water-repellent films with a water contact angle of 150 degree have been synthesized by capacitively couple plasma enhanced chemical vapor deposition using C2H2F2 / Ar mixture gases for next generation automobile window. Scanning electron microscopy shows that the prepared films have an irregular rough microstructure in which particles of submicron diameter are complicatedly intertwined. Fourier-transform infrared spectroscopy indicates that the films include components of the C-H and C-F bonds, characterized by having a hydrophobic nature. A zirconium oxide (ZrO2) thin film was prepared using oxygen inductively coupled plasma sputtering of the zirconium target with a negative bias for protecting china from metallic contamination. It is found that the prepared ZrO2 films have water-repellent nature with contact angle of about 100 degree.
The transactions of the Institute of Electrical Engineers of Japan.A
The Journal of the Institute of Electrical Engineers of Japan