プラズマコーティングによる撥水膜合成技術とその応用

抄録

The preparation of water-repellent films by plasma-coating has been reviewed and then unique applications of the hydrophobic films are also introduced. Ultra-water-repellent films with a water contact angle of 150 degree have been synthesized by capacitively couple plasma enhanced chemical vapor deposition using C₂H₂F₂ / Ar mixture gases for next generation automobile window. Scanning electron microscopy shows that the prepared films have an irregular rough microstructure in which particles of submicron diameter are complicatedly intertwined. Fourier-transform infrared spectroscopy indicates that the films include components of the C-H and C-F bonds, characterized by having a hydrophobic nature. A zirconium oxide (ZrO₂) thin film was prepared using oxygen inductively coupled plasma sputtering of the zirconium target with a negative bias for protecting china from metallic contamination. It is found that the prepared ZrO₂ films have water-repellent nature with contact angle of about 100 degree.