Abstract
This paper describes an analysis of high frequency electromagnetic field by the finite element analysis of Maxwell equations including the displacement current. A stationary vector wave equation for the high frequency electromagnetic field analysis is solved taking an electric field as unknown functions. Then, to solve subdomains by the direct method, the direct method based on the LDLT decomposition method is introduced in subdomains. If the direct method is applied for solving subdomain problems, the computation time seems to be reduced by the improved accuracy of subdomain problems, and storing matrices that are results of the decomposition on main memory.