電気学会論文誌A(基礎・材料・共通部門誌)
Online ISSN : 1347-5533
Print ISSN : 0385-4205
ISSN-L : 0385-4205
特集論文
高周波バリア放電のマクロモデル
民田 太一郎岩蕗 寛康岩田 明彦
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キーワード: バリア放電, 回路モデル
ジャーナル 認証あり

2022 年 142 巻 3 号 p. 52-58

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We have developed a macro model that focuses only on electrical characteristics to handle the discharge phenomenon as a circuit. We considered the discharge as a kind of non-equilibrium system and modeled the transient changes in the discharge impedance. We also examined how to fix these model parameters from measurable values. We applied it to the high frequency dielectric barrier discharge and obtain sufficient agreement with the measurement results. We think that this model can be applied, not only to discharge phenomena but also as a method for circuit-modeling a general physical phenomenon in which the state changes transiently in a non-equilibrium system.

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