電気学会論文誌A(基礎・材料・共通部門誌)
Online ISSN : 1347-5533
Print ISSN : 0385-4205
ISSN-L : 0385-4205
ポリイミドヘのパルス•レーザ照射によつて得られる炭素フィルムとその応用
遠藤 守信内藤 耕太石部 卓上田 真裕押田 京一笠井 利幸
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1997 年 117 巻 6 号 p. 638-644

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Carbon film has been prepared by irradiation of pulse YAG laser (wave length 1064nm) to polyimide film under N2 or ordinary atmosphere. By laser irradiation polyimide were transferred to carbon film, with low degree of crystallinity, The room temperature electrical resistivities are about 0.1Ω•Cm, and their temperature dependencies are similar to those of amorphous or turbostratic carbons with negative temperature coefficient. Carbon as well as electroplated circuit by Ni was successfully prepared in finer pattern than those formed by conventional printing method of conducting paint.

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