抄録
The experimental investigations of the discharge characteristics of planar type surface wave prosessing plasmas(SWP) have been carried out. On this apparatus, the efficiency of microwave power absorption into the plasma depends strongly on the thickness of the dielectric window. Especially at the thickness of 12mm, it has been found that more than 80% of microwave power is absorbed into the plasma. In order that the uniform power absorption is brought about effectively in a wide range of gas pressure, the dielectric waveg-uide that is placed above the dielectric window needs the air gap between them. These experimental results will enable us to improve the apparatus configuration to achieve better operational performances of surface wave plasmas.
