抄録
This paper presents a chain motion by a serial microactuator in the following view points: 1) Design of a microactuator providing a large displacement; 2) Concept of a mechatronics relay transmitting both electrical and mechanical signals. A serial microactuator composed of four sets of comb structures was designed and fabricated on SOI substrate to confirm a proposed motion. Experimental results on a chain motion of a serial microactuator will be reported in this paper.
