2003 年 123 巻 3 号 p. 79-84
This paper presents the quantitative analysis and influence of CO2 dissolved in TMAH for silicon etching. The etching rate on the (100) plane increases at first and then decreases with the increase of CO2 concentration. The etching rate on the (110) plane decreases monotonously with the increase of CO2 concentration. Although the etching rate on the (110) plane is higher than that on the (100) plane at ordinary conditions, this relationship is reversed at a certain quantity of CO2 dissolution. The etch-stop appears at higher concentration of CO2 dissolution. It was confirmed that changes of the silicon etching characteristics are caused by concentration of carbonate anions. The CO2 dissolution has influence on the (100) plane and no influence on the (110) plane.
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