抄録
A prototype of AFM (Atomic Force Microscope) tweezers will be presented. In order to combine the functions of nano objects manipulation with AFM observation, we have developed a tweezers-type AFM probe device using micromachining technology. The device has two thin wedge-type arms shaped by anisotropic etching of silicon and local oxidation of silicon in techniques; one plays the role of an AFM probe, and another plays that of a manipulation probe in cooperation with manolithically fabricated micro actuators. The AFM tweezers will offer new research methods in bio/nano technology.
