電気学会論文誌E(センサ・マイクロマシン部門誌)
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
125 巻, 11 号
選択された号の論文の3件中1~3を表示しています
解説
  • 藤田 博之
    2005 年125 巻11 号 p. 437-443
    発行日: 2005年
    公開日: 2006/02/01
    ジャーナル フリー
    Besides rapid commercialization, MEMS is contributing to expand scientific frontiers in nano-scale and bio technology. This paper first discuses how to combine MEMS technologies with bottom-up nano technologies in order to establish the scientific foundation and to construct engineered nano systems. The following part deals with MEMS tools for nano science and a bio actuated MEMS device. A pair of probes with 10-50 nm tip radius were micromachined with integrated microactuators for adjusting the distance between tips in micrometer range. The device was applied to obtain nano tweezers that handle DNA molecules. DNA molecules were captured between tips by electric field and retrieved from solution. Mechanical stretching and the observation in electron microscopes were performed. For bio assay of enzymes, MEMS chips with fL-chambers were fabricated in which the enzymatic product of F1-ATPase was evaluated in a single molecular level. Correlation between its rotational motion and the number of synthesized/consumed ATP molecules was measured. In addition, a conveyance device driven by bio motor molecules (microtubules and kinesin) was demonstrated.
  • Adarsh Sandhu
    2005 年125 巻11 号 p. 444-447
    発行日: 2005年
    公開日: 2006/02/01
    ジャーナル フリー
    There is growing interest in the development of biosensing instrumentation based on magnetic labeling of biological molecules and subsequent detection of the superparamagnetic particles that constitute the labels. Thin film micro-Hall sensors are a practical choice of device for detection of magnetic particles because of their scalability, high sensitivity and compatibility with coventional silicon ICs. In the paper, we review the basic physics of Hall sensors and describe the results of our recent expriments on the fabrication of high sensitivity micro-Hall biosensors using InSb thin films for the detection of superparamagnetic particles coated with biological molecules. Issues related to sensor fabrication, magnetic field sensitivity and biological functionalization are discussed.
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