抄録
This paper describes an ultra compact and high sensitivity fluidic sensor suitable for measuring flow velocity and direction with the operating principle of detecting flow-induced temperature gradient on the surface. This flow sensor is fabricated utilizing surface micromachining technologies on a silicon substrate. The flow sensor has high sensitivity of flow velocities as high as 0.01m/s. Polycrystalline silicon (poly-Si) film heater and poly-Si/Aluminum thermocouples are adopted on a dielectric thin film membrane thermally isolated from the substrate.
